Conference paper · Book chapter
Application of the method of auxiliary sources in optical diffraction microscopy
Scientific Computing, Department of Applied Mathematics and Computer Science, Technical University of Denmark1
Department of Applied Mathematics and Computer Science, Technical University of Denmark2
Dynamical systems, Department of Mathematics, Technical University of Denmark3
Department of Mathematics, Technical University of Denmark4
Technical University of Denmark5
Metamaterials, Department of Photonics Engineering, Technical University of Denmark6
Department of Photonics Engineering, Technical University of Denmark7
The Method of Auxiliary Sources is used for characterisation of grating defects. Grating profiles are characterised by best fit matching of a library of diffraction efficiencies with numerical simulated diffraction efficiencies with defects. It is shown that the presented method can solve the inverse problem with an accuracy usually thought to require rigorous electromagnetic theories.
| Language: | English |
|---|---|
| Publisher: | Springer |
| Year: | 2010 |
| Edition: | 1 |
| Pages: | 899-905 |
| Proceedings: | 15th European Conference on Mathematics for Industry |
| ISBN: | 3642121098 , 3642121101 , 9783642121098 and 9783642121104 |
| ISSN: | 16123956 |
| Types: | Conference paper and Book chapter |
| DOI: | 10.1007/978-3-642-12110-4_144 |
| ORCIDs: | Karamehmedović, Mirza , Sørensen, Mads Peter and Lavrinenko, Andrei |
