Conference paper
Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting
We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output.
Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.
| Language: | English |
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| Publisher: | IEEE |
| Year: | 2011 |
| Pages: | 679-682 |
| Proceedings: | 16th International Solid-State Sensors, Actuators and Microsystems Conference |
| ISBN: | 145770157X , 145770157x , 9781457701573 , 1457701553 , 1457701561 , 9781457701559 and 9781457701566 |
| Types: | Conference paper |
| DOI: | 10.1109/TRANSDUCERS.2011.5969848 |
| ORCIDs: | Lei, Anders , Birkelund, Karen , Thomsen, Erik Vilain and Hansen, Ole |
Electrodes Energy harvesting Fabrication Micromechanical devices Resonant frequency Thick films Vibrations
Energy harvester MEMS PZT Si bimorph energy harvesting integrated proof mass lead compounds micromechanical devices piezoelectric devices piezoelectric material piezoelectric materials screen printed thick film bimorph MEMS cantilever device silicon thick film thick film devices thick films vibration energy harvesting vibrations zirconium compounds
