Conference paper
Homogeneity analysis of high yield manufacturing process of mems-based pzt thick film vibrational energy harvesters
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Technical University of Denmark3
Meggitt A/S4
MEMS-AppliedSensors Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
This work presents a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibrational energy harvesters aimed towards vibration sources with peak frequencies in the range of a few hundred Hz. By combining KOH etching with mechanical front side protection, SOI wafer to accurately define the thickness of the silicon part of the harvester and a silicon compatible PZT thick film screen-printing technique, we are able to fabricate energy harvesters on wafer scale with a yield higher than 90%.
The characterization of the fabricated harvesters is focused towards the full wafer/mass-production aspect; hence the analysis of uniformity in harvested power and resonant frequency.
Language: | English |
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Year: | 2011 |
Pages: | 387-390 |
Proceedings: | Power MEMS 2011 |
Types: | Conference paper |
ORCIDs: | Lei, Anders , Thomsen, Erik Vilain and Birkelund, Karen |