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Conference paper

Design and Fabrication of Air-core Inductors for Power Conversion

From

DTU Danchip, Technical University of Denmark1

Institute for Product Development2

Department of Electrical Engineering, Technical University of Denmark3

Electronics, Department of Electrical Engineering, Technical University of Denmark4

Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) [1].

Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology.

As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.

Language: English
Year: 2016
Proceedings: 5th International Workshop on Power Supply On Chip
Types: Conference paper
ORCIDs: Lê Thanh, Hoà , Ouyang, Ziwei , Knott, Arnold , Jensen, Flemming and Han, Anpan

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