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Conference paper

Current Spreading Layer with High Transparency and Conductivity for near-ultraviolet light emitting diodes

By Lin, Li1,2; Jensen, Flemming3; Herstrøm, Berit3; Ou, Haiyan1,2

From

Department of Photonics Engineering, Technical University of Denmark1

Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark2

DTU Danchip, Technical University of Denmark3

Transparent conductive aluminum-doped zinc oxide (AZO) layer was deposited on GaN-based near-ultraviolet (NUV) light emitting epitaxial wafers as current spreading layer by a sputtering process. Efforts were made to improve the electrical properties of AZO in order to produce ohmic contact.

Language: English
Year: 2017
Proceedings: 5<sup>th</sup> International workshop on LEDs and solar application
Types: Conference paper
ORCIDs: Jensen, Flemming , Herstrøm, Berit and Ou, Haiyan
Keywords

Aluminum-doped zinc oxide Near ultraviolet light emitting diodes Transparent conductive current spreading layer

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