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title:(Fabrication AND of AND 3D AND Air-core AND MEMS AND Inductors)

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Advanced
1 Conference paper

Fabrication of 3D Air-core MEMS Inductors

Year: 2016

Language: English

phkbofe jndlicagm
2 Journal article

Fabrication of 3D Air-core MEMS Inductors for High Frequency Power Electronic Applications

We report a fabrication technology for 3D air-core inductors for small footprint and very-high-frequency power conversions. Our process is scalable and highly generic for fabricating inductors with a wide range of geometries and core shapes. We demonstrate spiral, solenoid, and toroidal inductors

Year: 2018

Language: English

mdclfibgeokha j pn

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