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Conference paper

Electron-beam patterning organic ice resists

By Elsukova, Anna1; Tiddi, William1; Han, Anpan2; Beleggia, Marco3,4

From

Technical University of Denmark1

Department of Mechanical Engineering, Technical University of Denmark2

DTU Danchip, Technical University of Denmark3

Center for Electron Nanoscopy, Technical University of Denmark4

Language: English
Year: 2018
Proceedings: The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication
Types: Conference paper
ORCIDs: Han, Anpan and Beleggia, Marco

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