Conference paper
Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics
Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.
Language: | English |
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Year: | 2017 |
Proceedings: | 8<sup>th</sup> International Conference on Surface Plasmon Photonics |
Types: | Conference paper |
ORCIDs: | Shkondin, Evgeniy , Takayama, Osamu , Liu, Pei , Mar, Mikkel Dysseholm , Jensen, Flemming and Lavrinenko, Andrei |