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Conference paper

Microfabrication of X-Ray grating for Talbot Interferometry

By Silvestre, Chantal1,2,3; Chang, Bingdong1; Jansen, Henri1; Hansen, Ole2,3

From

DTU Danchip, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark3

Language: English
Year: 2017
Proceedings: 43rd International conference on Micro and Nano Engineering
Types: Conference paper
ORCIDs: Silvestre, Chantal , Chang, Bingdong , Jansen, Henri and Hansen, Ole
Keywords

Dry etching Talbot interferometer X-ray gratings

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