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Conference paper

Transmittance enhancement in 6H-SiC with nanocone structures

By Lu, Weifang1,2; Ou, Yiyu1,2; Ou, Haiyan1,2

From

Department of Photonics Engineering, Technical University of Denmark1

Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark2

Enhanced transmittance of 6H-SiC with nanocone structures were achieved by using self-assembled Au nanoparticles as etching mask. HF passivation process of nanocone structures was investigated to further improve the transmittance. The max transmittance of structured SiC is significantly improved by 10%.

Language: English
Year: 2015
Proceedings: 3rd European-Asian workshop on Light-Emitting Diodes
Types: Conference paper
ORCIDs: Lu, Weifang , Ou, Yiyu and Ou, Haiyan
Keywords

HF passivation Nanocone Transmittance

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