Conference paper
Design and Fabrication of Air-core Inductors for Power Conversion
Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) [1].
Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology.
As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.
Language: | English |
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Year: | 2016 |
Proceedings: | 5th International Workshop on Power Supply On Chip |
Types: | Conference paper |
ORCIDs: | Lê Thanh, Hoà , Ouyang, Ziwei , Knott, Arnold , Jensen, Flemming and Han, Anpan |