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Boolean: (bicycle AND helmet) OR (head AND protection) (always group AND in parenthesis)
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title:(Fabrication AND of AND high AND aspect AND ratio AND SU-8 AND micropillar AND arrays)

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10 items by relevance
1 Conference paper

Fabrication of high aspect ratio SU-8 micropillar arrays

Amato, Letizia; Keller, Stephan Sylvest; Heiskanen, Arto; Dimaki, Maria; Emnéus, Jenny; Boisen, Anja; et al. (1 more)

Year: 2011

Language: English

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m dbhlogcip f njkea
2 Journal article

Fabrication of high-aspect ratio SU-8 micropillar arrays

Amato, Letizia; Keller, Stephan S.; Heiskanen, Arto; Dimaki, Maria; Emnéus, Jenny; Boisen, Anja; et al. (1 more)

Microelectronic Engineering — 2012, Volume 98, pp. 483-487

SU-8 is the preferred photoresist for development and fabrication of high aspect ratio (HAR) three dimensional patterns. However, processing of SU-8 is a challenging task, especially when the film thickness as well as the aspect ratio is increasing and the size of the features is close

Year: 2012

Language: English

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nojab cldpm i hgkef

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