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Conference paper

Characterization of the time-evolving bending profile of micro-cantilevers

By Alstrøm, Tommy Sonne1,2,3; Bosco, Filippo3,4; Larsen, Jan1,2; Bache, Michael3,4; Brøgger, Anna Line3,4; Frøhling, Kasper Bayer3,5; Hwu, E. T.; Chen, Ching-Hsiu; Hwang, Ing-Shouh; Boisen, Anja3,4

From

Department of Applied Mathematics and Computer Science, Technical University of Denmark1

Cognitive Systems, Department of Applied Mathematics and Computer Science, Technical University of Denmark2

Department of Micro- and Nanotechnology, Technical University of Denmark3

Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark4

Surface Engineering, Department of Micro- and Nanotechnology, Technical University of Denmark5

Language: English
Year: 2014
Proceedings: 11th Annual International Workshop on Nanomechanical Sensing
Types: Conference paper
ORCIDs: Alstrøm, Tommy Sonne , Larsen, Jan , Bache, Michael and Boisen, Anja

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Analysis