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Interpreted as:
title:(High AND pattern AND density AND nanoimprint AND lithography AND stamps AND fabricated AND by AND means AND of AND negative AND electron AND beam AND lithography AND resist AND TEBN-1 AND and AND dry AND etching AND in AND silicon)
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Year: 2005
Language: English
Proceedings of the 4th Internternational Conference on Nanoimprint and Nanoprint, Nnt'05 — 2006
Year: 2006
Language: English