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All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes

Kristensen, Anders; Matteucci, Marco; Østergaard, Peter Friis; Taboryski, Rafael J.; Marie, Rodolphe

Year: 2012

Language: English

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2 Conference paper

All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes

Østergaard, Peter Friis; Matteucci, Marco; Marie, Rodolphe; Kristensen, Anders; Taboryski, Rafael J.

Nanotechnology 2012: Electronics, Devices, Fabrication, Mems, Fluidics and Computational — 2012, pp. 482-485

in the micro- and nanoregime is required. To obtain this, injection molding is included in the research process for making several chips (100-1000) with the same layout. The time it takes for the individual chip to be fabricated in this way is much shorter than with conventional cleanroom methods

Year: 2012

Language: English

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