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1 Journal article

All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing

Reck, Kasper; Thomsen, Erik Vilain; Hansen, Ole

Sensors — 2011, Volume 11, Issue 11, pp. 10615-10623

We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing

Year: 2011

Language: English

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2 Journal article

Micro-fabricated all optical pressure sensors

Havreland, Andreas Spandet; Petersen, Søren Dahl; Østergaard, Christian; Reck-Nielsen, Kasper; Thomsen, Erik Vilain

Microelectronic Engineering — 2017, Volume 174, pp. 11-15

Optical pressure sensors can operate in certain harsh application areas where the electrical pressure sensors cannot. However, the sensitivity is often not as good for the optical sensors. This work presents an all optical pressure sensor, which is fabricated by micro fabrication techniques, where

Year: 2017

Language: English

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