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Matschuk
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Conference paper
Injection Molding of High Aspect Ratio Nanostructures
We present a process for injection molding of 40 nm wide and >100 nm high pillars (pitch: 200 nm). We explored the effects of mold coatings and injection molding conditions on the replication quality of nanostructures in cyclic olefin copolymer. We found that optimization of molding parameters
Year: 2011
Language: English
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Journal article
Injection molding of high aspect ratio sub-100 nm nanostructures 10.1088/0960-1317/23/2/025003
We have explored the use of mold coatings and optimized processing conditions to injection mold high aspect ratio nanostructures (height-to-width >1) in cyclic olefin copolymer (COC). Optimizing the molding parameters on uncoated nickel molds resulted in slight improvements in replication quality
Year: 2013
Language: English
